Owner Oerlikon Solar AG, Trubbach

Convention CH 30 September 2010 613350

Filing Date 25 March 2011

Class 7 Machinery and equipment for the plasma assisted manufacture or the plasma treatment of parts such as semiconductor devices, photovoltaic detectors, solar cells, flat panel displays and light emitting devices (such as LEDs and OLEDs), namely vacuum treatment installations for plasma assisted deposition, for plasma treatment and plasma etching, particularly vacuum installations for depositing fine films (particularly PECVD, ACVD); vacuum installations for dry etching, plasma treatment installations, parallel plate plasma reactors

Class 9 Instruments and detectors for electrical, optical and specific characterization of the materials of semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices (instruments such as plasma display panels, gas analysers, measurement systems); apparatus for monitoring production processes and quality of semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices

Class 37 Installation at factories of machines and equipment for the plasma assisted manufacture or the plasma treatment of parts such as semiconductor devices, photovoltaic detectors, solar cells, flat panel displays and light emitting devices; servicing and repair of such factories

Class 42 Scientific services and research services, namely design, development and analysis of plasma processes, semiconductor products, vacuum treatment installations for plasma assisted production and treatment processes