Owner MKS Instruments, Inc. a Massachusetts corporation

Service Freehills

Filing Date 5 April 2006

Class 9 Computer software; computer hardware in this class; electrical apparatus for monitoring; electrical apparatus for use in regulation; sensors, electrical instrumentation, gauges, switches and meters for measurement and control of fluid pressure, vacuum and gas flow; residual gas analyzers; monitors for detecting gas compositions within a process chamber; mass spectrometers; electrical analog-digital interface adapters; computer hardware used for measurement and control of fluid pressure, vacuum and gas flow; radio frequency, direct current and microwave power supplies and generators; power generators for converting energy from chemical gas reactions; gas and fluid pressure valves, flanges and fittings for controlling, containing, isolating and shutting off gas and fluid flow; gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; gas filters and purifiers; heaters; helium leak detectors; gas detectors and analyzers; calibration equipment for monitoring and adjusting gas and fluid pressure and flow; traps for capturing waste materials exiting from a process chamber, the aforementioned being scientific apparatus; liquid delivery system composed primarily of a pump, vaporizer, and controller for vaporizing a liquid into a gas and delivering the gas to a process chamber, the aformentioned being scientific apparatus; computer hardware and software for measuring the transmission, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same; software for operating optical spectrometers; software for operating mass spectrometers; computer hardware and software for determining the presence and measurement of residual contaminants; micro-processor based data communication devices for communicating between quadrapole gas or fluid mass analyzers for and a computer; devices used to generate radio waves and microwave plasma; reactive gas generators including remote plasma sources and ozone generators; controllers, computer hardware and software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices; radio frequency amplifiers and radio frequency power generators; DC power generators