Sputtering cathode having a nonbonded semiconducting target
Details for Australian Patent Application No. 2011224041 (hide)
International Classifications
Event Publications
29 September 2011 Complete Application Filed
Priority application(s): 12/892,414 28.09.10 US
12 April 2012 Application Open to Public Inspection
Published as AU-A-2011224041
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2011224040-Methods of sputtering using a nonbonded semiconducting target
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