Methods of sputtering using a nonbonded semiconducting target

Details for Australian Patent Application No. 2011224040 (hide)

Owner PrimeStar Solar, Inc.

Inventors Black, Russell Weldon; Gossman, Robert Dwayne; O'Keefe, Peter Lynch; Feldman-Peabody, Scott Daniel

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011224040

Priority 12/892,360 28.09.10 US

Filing date 14 September 2011

Wipo publication date 12 April 2012

International Classifications

H01L 21/203 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01L 21/363 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

29 September 2011 Complete Application Filed

  Priority application(s): 12/892,360 28.09.10 US

12 April 2012 Application Open to Public Inspection

  Published as AU-A-2011224040

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