PLASMA TREATING APPARATUS

Details for Australian Patent Application No. 2002345366 (hide)

Owner MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventors SAKEMI, Shoji; ARITA, Kiyoshi; IWAI, Tetsuhiro; HAJI, Hiroshi

Pub. Number AU-A-2002345366

PCT Number PCT/JP02/06294

PCT Pub. Number WO2003/001558

Priority 2001-190973 25.06.01 JP; 2001-231469 31.07.01 JP

Filing date 24 June 2002

Wipo publication date 8 January 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 2001-190973 25.06.01 JP; 2001-231469 31.07.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002345366

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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