ELECTRODE MEMBER FOR PLASMA TREATING APPARATUS, PLASMA TREATING APPARATUS AND PLASMA TREATING METHOD

Details for Australian Patent Application No. 2002345365 (hide)

Owner KROSAKI HARIMA CORPORATION MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventors IWAI, Tetsuhiro; SAKEMI, Shoji; SATOU, Nobuhiro; MATANO, Taiji; HAJI, Hiroshi; ARITA, Kiyoshi

Pub. Number AU-A-2002345365

PCT Number PCT/JP02/06293

PCT Pub. Number WO2003/001557

Priority 2001-190891 25.06.01 JP

Filing date 24 June 2002

Wipo publication date 8 January 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 2001-190891 25.06.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002345365

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002345366-PLASMA TREATING APPARATUS

2002345364-Beta-BENZYLOXYASPARTATE DERIVATIVES WITH AMINO GROUP ON BENZENE RING