FORMATION OF SELF-ORGANIZED STACKED ISLANDS FOR SELFALIGNED CONTACTS OF LOW DIMENSIONAL STRUCTURES

Details for Australian Patent Application No. 2002335309 (hide)

Owner PAUL SCHERRER INSTITUT

Inventors GRUTZMACHER, Detlev

Pub. Number AU-A-2002335309

PCT Number PCT/EP02/09921

PCT Pub. Number WO2003/025989

Priority 01122320.3 18.09.01 EP

Filing date 5 September 2002

Wipo publication date 1 April 2003

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/10 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 01122320.3 18.09.01 EP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002335309

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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