EXPOSURE DEVICE, OPTICAL MEMBER MOUNTING MEMBER, OPTICAL MEMBER DETACHING JIG, AND METHOD OF MANUFACTURING DEVICE

Details for Australian Patent Application No. 2002217546 (hide)

Owner NIKON CORPORATION

Inventors ONDA, Minoru

Pub. Number AU-A-2002217546

PCT Pub. Number WO2002/052624

Priority 2000-399556 27.12.00 JP

Filing date 27 December 2001

Wipo publication date 8 July 2002

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G02B 007/00 Mountings, adjusting means, or light-tight connections, for optical elements

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002217546

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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