Semiconductor device and its manufacturing method

Details for Australian Patent Application No. 2002217545 (hide)

Owner Ohmi, T.

Inventors Sugawa, Shigetoshi; Hirayama, Masaki; Shirai, Yasuyuki; Ohmi, Tadahiro

Agent Spruson & Ferguson

Pub. Number AU-B-2002217545

PCT Pub. Number WO2002/054473

Priority 2000-402834 28.12.00 JP; 2001-94245 28.03.01 JP

Filing date 27 December 2001

Wipo publication date 16 July 2002

Acceptance publication date 17 March 2005

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-B-2002217545

17 March 2005 Application Accepted

  Published as AU-B-2002217545

14 July 2005 Standard Patent Sealed

22 July 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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