APPARATUS AND METHOD FOR SURFACE POLISHING

Details for Australian Patent Application No. 2001272783 (hide)

Owner KABUSHIKI KAISHA ISHIIHYOKI

Inventors NAKANO, Teruyuki; KOZAWA, Yasuhiro; TAMBO, Hitoshi; NAKAHASHI, Manabu

Pub. Number AU-A-2001272783

PCT Pub. Number WO2002/067307

Priority 2001-43887 20.02.01 JP

Filing date 23 July 2001

Wipo publication date 4 September 2002

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

Event Publications

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2001272783

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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