System and Process for High-Density, Low-Energy Plasma Enhanced Vapor Phase Epitaxy

Details for Australian Patent Application No. 2012202511 (hide)

Owner Sulzer Metco AG

Inventors Von Kaenel, Hans

Agent Wrays

Pub. Number AU-A-2012202511

Parent 2006224282

Filing date 1 May 2012

Wipo publication date 24 May 2012

International Classifications

C23C 14/32 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

C30B 23/08 (2006.01) Single-crystal growth from vapours - by condensing ionised vapours

C30B 29/40 (2006.01) Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

17 May 2012 Complete Application Filed

24 May 2012 Application Open to Public Inspection

  Published as AU-A-2012202511

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