Method and system of pulsed-pressure chemical vapor deposition

Details for Australian Patent Application No. 2012101373 (hide)

Owner The University of Canterbury Krumdieck, S. Furkert, S.

Inventors Krumdieck, Susan Pran; Furkert, Suzanne Alice

Agent A J Park

Pub. Number AU-A-2012101373

Priority 595057 07.09.11 NZ

Filing date 6 September 2012

Opi date 11 October 2012

International Classifications

C23C 16/18 Chemical deposition or plating by decomposition - from metallo-organic compounds

Event Publications

20 September 2012 Innovation Patent Application Filed

  Priority application(s): 595057 07.09.11 NZ

11 October 2012 Innovation Patent Open to Public Inspection

  Published as AU-A-2012101373

11 October 2012 Innovation Patent Sealed

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