Method for producing trichlorosilane

Details for Australian Patent Application No. 2011225614 (hide)

Owner Shin-Etsu Chemical Co., Ltd.

Inventors Tanaka, Shuji; Tabata, Masaki

Agent Spruson & Ferguson

Pub. Number AU-A-2011225614

PCT Pub. Number WO2011/111335

Priority 2010-052548 10.03.10 JP

Filing date 1 March 2011

Wipo publication date 15 September 2011

International Classifications

C01B 33/107 Silicon

Event Publications

11 October 2012 PCT application entered the National Phase

  PCT publication WO2011/111335 Priority application(s): WO2011/111335

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