Owner Evonik Degussa GmbH

Inventors Wieber, Stephan; Patz, Matthias; Stutzel, Bernhard; Colle, Michael; Brausch, Nicole; Klatt, Janette; Hessing, Jutta

Agent Spruson & Ferguson

Pub. Number AU-A-2011219919

PCT Pub. Number WO2011/104147

Priority 10 2010 002 405.8 26.02.10 DE

Filing date 16 February 2011

Wipo publication date 1 September 2011

C08G 77/60 Macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon

C07F 7/21 Compounds containing elements of the 4th Group of the Periodic System

C09D 183/16 Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only - in which all the silicon atoms are connected by linkages other than oxygen atoms

H01L 21/208 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof