Method for the application of a conformal nanocoating by means of a low pressure plasma process

Details for Australian Patent Application No. 2011208879 (hide)

Owner Europlasma nv

Inventors Legein, Filip; Vanlandeghem, Anthony; Martens, Peter

Agent Spruson & Ferguson

Pub. Number AU-A-2011208879

PCT Pub. Number WO2011/089009

Priority 2010/0035 22.01.10 BE

Filing date 21 January 2011

Wipo publication date 28 July 2011

International Classifications

B05D 7/24 Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials - for applying particular liquids or other fluent materials

H01J 37/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H01L 23/29 Details of semiconductor or other solid state devices

H05K 3/28 Apparatus or processes for manufacturing printed circuits - Applying non-metallic protective coatings

Event Publications

9 August 2012 PCT application entered the National Phase

  PCT publication WO2011/089009 Priority application(s): WO2011/089009

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