Method and device for treating silicon substrates

Details for Australian Patent Application No. 2010334764 (hide)

Owner Gebr. Schmid GmbH

Inventors Habermann, Dirk; Schoch, Martin; Izaaryene, Maher; Stein, Friedhelm

Agent Griffith Hack

Pub. Number AU-A-2010334764

PCT Pub. Number WO2011/076920

Priority 10 2009 060 931.8 23.12.09 DE

Filing date 23 December 2010

Wipo publication date 30 June 2011

International Classifications

H01L 21/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

21 June 2012 PCT application entered the National Phase

  PCT publication WO2011/076920 Priority application(s): WO2011/076920

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