Methods of making semiconductor devices having implanted sidewalls and devices made thereby

Details for Australian Patent Application No. 2010328256 (hide)

Owner SS SC IP, LLC

Inventors Sheridan, David C.; Ritenour, Andrew

Agent Davies Collison Cave

Pub. Number AU-A-2010328256

PCT Pub. Number WO2011/071973

Priority 61/267,524 08.12.09 US

Filing date 8 December 2010

Wipo publication date 16 June 2011

International Classifications

H01L 21/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 29/78 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

21 June 2012 PCT application entered the National Phase

  PCT publication WO2011/071973 Priority application(s): WO2011/071973

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