Carbon electrode and equipment for manufacturing polycrystalline silicon rod

Details for Australian Patent Application No. 2010324095 (hide)

Owner Shin-Etsu Chemical Co., Ltd.

Inventors Netsu, Shigeyoshi; Kurotani, Shinichi; Oguro, Kyoji; Kume, Fumitaka; Hirahara, Masaru

Agent Spruson & Ferguson

Pub. Number AU-A-2010324095

PCT Pub. Number WO2011/064940

Priority 2009-268429 26.11.09 JP

Filing date 22 October 2010

Wipo publication date 3 June 2011

International Classifications

C01B 33/035 (2006.01) Silicon

H01L 21/203 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 May 2012 Amendment Made

  The nature of the amendment is: Amend the invention title to read Carbon electrode and apparatus for manufacturing polycrystalline silicon rod

31 May 2012 PCT application entered the National Phase

  PCT publication WO2011/064940 Priority application(s): WO2011/064940

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