Method for producing silicon layers

Details for Australian Patent Application No. 2010321034 (hide)

Owner Evonik Degussa GmbH

Inventors Wieber, Stephan; Patz, Matthias; Carius, Reinhard; Bronger, Torsten; Colle, Michael

Agent Spruson & Ferguson

Pub. Number AU-A-2010321034

PCT Pub. Number WO2011/061106

Priority 102009053806.2 18.11.09 DE

Filing date 10 November 2010

Wipo publication date 26 May 2011

International Classifications

C23C 18/14 (2006.01) Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

C23C 18/12 (2006.01) Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

H01L 21/02 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

10 May 2012 PCT application entered the National Phase

  PCT publication WO2011/061106 Priority application(s): WO2011/061106

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