Method and device for treating a substrate surface of a substrate

Details for Australian Patent Application No. 2010310049 (hide)

Owner Gebr. Schmid GmbH & Co.

Inventors Schmid, Christian

Agent Griffith Hack

Pub. Number AU-A-2010310049

PCT Pub. Number WO2011/047894

Priority 10 2009 050 845.7 19.10.09 DE

Filing date 28 July 2010

Wipo publication date 28 April 2011

International Classifications

H01L 21/677 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Event Publications

17 May 2012 PCT application entered the National Phase

  PCT publication WO2011/047894 Priority application(s): WO2011/047894

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