Deposition of doped ZnO films on polymer substrates by UV-assisted chemical vapor deposition

Details for Australian Patent Application No. 2010306798 (hide)

Owner Arkema Inc.

Inventors Xu, Chen; Silverman, Gary S.; Korotkov, Roman Y.; Smith, Robert G.

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2010306798

PCT Pub. Number WO2011/047114

Priority 61/251,884 15.10.09 US

Filing date 14 October 2010

Wipo publication date 21 April 2011

International Classifications

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C03C 17/34 (2006.01) Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating - with at least two coatings having different compositions

G02B 1/11 (2006.01) Optical elements characterised by the material of which they are made

Event Publications

24 May 2012 PCT application entered the National Phase

  PCT publication WO2011/047114 Priority application(s): WO2011/047114

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