Penetrating plasma generating apparatus for high vacuum chambers

Details for Australian Patent Application No. 2010288081 (hide)

Owner MOSAIC CRYSTALS LTD.

Inventors Einav, Moshe

Agent Collison & Co

Pub. Number AU-A-2010288081

PCT Pub. Number WO2011/024174

Priority 61/237,642 27.08.09 US

Filing date 29 August 2010

Wipo publication date 3 March 2011

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

19 April 2012 PCT application entered the National Phase

  PCT publication WO2011/024174 Priority application(s): WO2011/024174

17 May 2012 Amendment Made

  The nature of the amendment is as shown in the statement(s) filed 27 Mar 2012

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