Method for purifying chlorosilanes

Details for Australian Patent Application No. 2010283420 (hide)

Owner Shin-Etsu Chemical Co., Ltd.

Inventors Nagai, Naoki; Shimizu, Takaaki; Uehara, Katsuhiro; Kubota, Tohru

Agent Spruson & Ferguson

Pub. Number AU-A-2010283420

PCT Pub. Number WO2011/018875

Priority 2009-187302 12.08.09 JP

Filing date 7 July 2010

Wipo publication date 17 February 2011

International Classifications

C01B 33/107 (2006.01) Silicon

Event Publications

9 February 2012 PCT application entered the National Phase

  PCT publication WO2011/018875 Priority application(s): WO2011/018875

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