Advanced photomask repair

Details for Australian Patent Application No. 2010266375 (hide)

Owner Nanoink, Inc.

Inventors Amro, Nabil; Sanedrin, Raymond; Disawal, Sandeep; Fragala, Joseph S.

Agent Davies Collison Cave

Pub. Number AU-A-2010266375

PCT Pub. Number WO2011/002806

Priority 61/222,096 30.06.09 US

Filing date 29 June 2010

Wipo publication date 6 January 2011

International Classifications

G03F 1/00 (2006.01) Preparation of originals for the photomechanical production of textured or patterned surfaces

C23C 18/12 (2006.01) Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

Event Publications

9 February 2012 PCT application entered the National Phase

  PCT publication WO2011/002806 Priority application(s): WO2011/002806

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