An inspection method and an inspection apparatus

Details for Australian Patent Application No. 2010262034 (hide)

Owner Wilcox Associates, Inc.

Inventors Stalker, Marc Philip; Clee, Stevan

Agent Fisher Adams Kelly

Pub. Number AU-A-2010262034

PCT Pub. Number WO2010/145881

Priority 2009901899 30.04.09 AU

Filing date 29 April 2010

Wipo publication date 23 December 2010

International Classifications

G01N 21/88 (2006.01) Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating the presence of flaws, defects or contamination

G01N 21/956 (2006.01) Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

29 September 2011 PCT application entered the National Phase

  PCT publication WO2010/145881 Priority application(s): WO2010/145881

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