A chemical vapour deposition system and process

Details for Australian Patent Application No. 2010213363 (hide)

Owner Griffith University

Inventors Iacopi, Alan Victor

Agent Davies Collison Cave

Pub. Number AU-A-2010213363

PCT Pub. Number WO2010/091473

Priority 2009900575 12.02.09 AU

Filing date 12 February 2010

Wipo publication date 19 August 2010

International Classifications

C23C 16/32 (2006.01) Chemical deposition or plating by decomposition - Carbides

C23C 16/00 (2006.01) Chemical deposition or plating by decomposition

Event Publications

28 July 2011 PCT application entered the National Phase

  PCT publication WO2010/091473 Priority application(s): WO2010/091473

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