Plasma deposition

Details for Australian Patent Application No. 2010213360 (hide)

Owner Gallium Enterprises Pty Ltd

Inventors Reynolds, Guy James; Martin, Conor Nicholas; Glowacki, Piotr; Wintrebert Ep Fouquet, Marie-Pierre Francoise; Barik, Satyanarayan; Chen, Patrick PoTsang

Agent Fisher Adams Kelly

Pub. Number AU-A-2010213360

PCT Pub. Number WO2010/091470

Priority 2009900612 13.02.09 AU; 2009900611 13.02.09 AU

Filing date 12 February 2010

Wipo publication date 19 August 2010

International Classifications

C23C 16/24 (2006.01) Chemical deposition or plating by decomposition

C23C 16/452 (2006.01) Chemical deposition or plating by decomposition

H05H 1/00 (2006.01) Generating plasma

Event Publications

8 September 2011 PCT application entered the National Phase

  PCT publication WO2010/091470 Priority application(s): WO2010/091470

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