Migration and plasma enhanced chemical vapor deposition

Details for Australian Patent Application No. 2010212553 (hide)

Owner Butcher, K.S.

Inventors Butcher, Kenneth Scott Alexander

Agent Davies Collison Cave

Pub. Number AU-A-2010212553

PCT Pub. Number WO2010/092482

Priority 61/185,953 10.06.09 US; 2653581 11.02.09 CA

Filing date 10 February 2010

Wipo publication date 19 August 2010

International Classifications

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

15 September 2011 PCT application entered the National Phase

  PCT publication WO2010/092482 Priority application(s): WO2010/092482

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