Method of forming an indium-containing transparent conductive oxide film, metal targets used in the method and photovoltaic devices utilizing said films

Details for Australian Patent Application No. 2010211053 (hide)

Owner HelioVolt Corporation

Inventors Deng, Yuepeng; Eldada, Louay; Oswald, Robert

Agent Pizzeys

Pub. Number AU-A-2010211053

PCT Pub. Number WO2010/090740

Priority 61/206,877 04.02.09 US

Filing date 4 February 2010

Wipo publication date 12 August 2010

International Classifications

C23C 14/00 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation

Event Publications

3 March 2011 PCT application entered the National Phase

  PCT publication WO2010/090740 Priority application(s): WO2010/090740

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