Plasma source with integral blade and method for removing materials from substrates

Details for Australian Patent Application No. 2010210386 (hide)

Owner AP Solutions, Inc.

Inventors Yancey, Peter Joseph; Kingsley, Jeffrey

Agent Pizzeys

Pub. Number AU-A-2010210386

PCT Pub. Number WO2010/091365

Priority 61/150,795 08.02.09 US

Filing date 8 February 2010

Wipo publication date 12 August 2010

International Classifications

C23F 4/04 (2006.01) Processes for removing metallic material from surfaces, not provided for in group or - by physical dissolution

H05H 1/24 (2006.01) Generating plasma - Generating plasma

Event Publications

25 August 2011 PCT application entered the National Phase

  PCT publication WO2010/091365 Priority application(s): WO2010/091365

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