Plasma source and method for removing materials from substrates utilizing pressure waves

Details for Australian Patent Application No. 2010210382 (hide)

Owner AP Solutions, Inc.

Inventors Yancey, Peter Joseph

Agent Pizzeys

Pub. Number AU-A-2010210382

PCT Pub. Number WO2010/091361

Priority 61/150,795 08.02.09 US

Filing date 8 February 2010

Wipo publication date 12 August 2010

International Classifications

C23F 4/04 (2006.01) Processes for removing metallic material from surfaces, not provided for in group or - by physical dissolution

H01H 1/24 (2006.01) Electric switches

H01L 21/3065 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 August 2011 PCT application entered the National Phase

  PCT publication WO2010/091361 Priority application(s): WO2010/091361

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