Wafer separating apparatus, wafer separating/transferring apparatus, wafer separating method, wafer separating/ transferring method and solar cell wafer separating/transferring method

Details for Australian Patent Application No. 2010205243 (hide)

Owner EXA Co., Ltd. Kabushiki Kaisha Watanabe Shoko

Inventors Kusuhara, Ichiki; Tsunashima, Kyouhei

Agent Shelston IP

Pub. Number AU-A-2010205243

PCT Pub. Number WO2010/082567

Priority 2009-004709 13.01.09 JP

Filing date 12 January 2010

Wipo publication date 22 July 2010

International Classifications

H01L 21/677 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/304 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

21 July 2011 PCT application entered the National Phase

  PCT publication WO2010/082567 Priority application(s): WO2010/082567

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2010205249-Project information display, project information display program, and electronic medical record information display

2010205242-Coating composition, process for production of the composition, and laminte with hard coat layer