ECR particle beam source apparatus, system and method

Details for Australian Patent Application No. 2009346233 (hide)

Owner Alpha Source LLC

Inventors Rosenthal, Glenn B.

Agent Davies Collison Cave

Pub. Number AU-A-2009346233

PCT Pub. Number WO2010/132068

Priority 61/178,857 15.05.09 US

Filing date 16 July 2009

Wipo publication date 18 November 2010

International Classifications

G21G 4/08 (2006.01) Radioactive sources

H01J 27/18 (2006.01) Ion beam tubes

H01J 37/08 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Ion sources

H05H 1/18 (2006.01) Generating plasma

Event Publications

19 January 2012 PCT application entered the National Phase

  PCT publication WO2010/132068 Priority application(s): WO2010/132068

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