Modifiable magnet configuration for arc vaporization sources

Details for Australian Patent Application No. 2009339328 (hide)

Owner Oerlikon Trading AG, Trubbach

Inventors Krassnitzer, Siegfried; Hagmann, Juerg; Gstoehl, Oliver

Agent Spruson & Ferguson

Pub. Number AU-A-2009339328

PCT Pub. Number WO2010/088947

Priority 10 2009 008 161.5 09.02.09 DE

Filing date 30 December 2009

Wipo publication date 12 August 2010

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H01J 37/34 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

25 August 2011 PCT application entered the National Phase

  PCT publication WO2010/088947 Priority application(s): WO2010/088947

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