Apparatus for treating and/or coating the surface of a substrate component

Details for Australian Patent Application No. 2009328788 (hide)

Owner Guhring OHG

Inventors Fiedler, Mario

Agent Watermark

Pub. Number AU-A-2009328788

PCT Pub. Number WO2010/069289

Priority 10 2008 062 332.6 15.12.08 DE

Filing date 4 December 2009

Wipo publication date 24 June 2010

International Classifications

C23C 14/35 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

28 July 2011 PCT application entered the National Phase

  PCT publication WO2010/069289 Priority application(s): WO2010/069289

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