Workpiece carrier

Details for Australian Patent Application No. 2009256934 (hide)

Owner Oerlikon Trading AG, Trubbach

Inventors Esser, Stefan

Agent Griffith Hack

Pub. Number AU-A-2009256934

PCT Pub. Number WO2009/149864

Priority 884/08 11.06.08 CH

Filing date 4 June 2009

Wipo publication date 17 December 2009

International Classifications

C23C 14/50 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

Event Publications

11 November 2010 PCT application entered the National Phase

  PCT publication WO2009/149864 Priority application(s): WO2009/149864

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