Methods of treating semiconducting materials and treated semiconducting materials

Details for Australian Patent Application No. 2009255656 (hide)

Owner Corning Incorporated

Inventors Cook, Glen B.; Mazumder, Prantik; Thomas, Christopher S.; Soni, Kamal K.; Venkataraman, Natesan

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2009255656

PCT Pub. Number WO2009/148561

Priority 12/156,499 02.06.08 US

Filing date 1 June 2009

Wipo publication date 10 December 2009

International Classifications

H01L 21/20 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 December 2010 PCT application entered the National Phase

  PCT publication WO2009/148561 Priority application(s): WO2009/148561

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