Method of reducing memory effects in semiconductor epitaxy

Details for Australian Patent Application No. 2009255307 (hide)

Owner DOW CORNING CORPORATION

Inventors Loboda, Mark

Agent Griffith Hack

Pub. Number AU-A-2009255307

PCT Pub. Number WO2009/148930

Priority 61/058,660 04.06.08 US

Filing date 29 May 2009

Wipo publication date 10 December 2009

International Classifications

C23C 16/44 (2006.01) Chemical deposition or plating by decomposition - characterised by the method of coating

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 January 2011 Amendment Made

  The nature of the amendment is as shown in the statement(s) filed 24 Dec 2010

27 January 2011 PCT application entered the National Phase

  PCT publication WO2009/148930 Priority application(s): WO2009/148930

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