Halogenated polysilane and plasmachemical process for producing the same
Details for Australian Patent Application No. 2009253522 (hide)
International Classifications
Event Publications
13 January 2011 PCT application entered the National Phase
PCT publication WO2009/143823 Priority application(s): WO2009/143823
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2009253523-Halogenated polysilane and thermal process for producing the same
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