MEMS device with independent rotation in two axes of rotation

Details for Australian Patent Application No. 2009242920 (hide)

Owner Micralyne Inc.

Inventors Keyworth, Barrie; Crawford, Jared; Kornelsen, Kevin

Agent Davies Collison Cave

Pub. Number AU-A-2009242920

PCT Pub. Number WO2009/132440

Priority 61/048,724 29.04.08 US

Filing date 29 April 2009

Wipo publication date 5 November 2009

International Classifications

B81B 7/02 (2006.01) Micro-structural systems

B81B 3/00 (2006.01) Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81B 5/00 (2006.01) Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements

G02B 26/08 (2006.01) Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

H01L 23/52 (2006.01) Details of semiconductor or other solid state devices - Arrangements for conducting electric current within the device in operation from one component to another

Event Publications

9 December 2010 PCT application entered the National Phase

  PCT publication WO2009/132440 Priority application(s): WO2009/132440

12 May 2011 Amendment Made

  The nature of the amendment is as shown in the statement(s) filed 11 Apr 2011

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