Fabrication of atomic scale devices

Details for Australian Patent Application No. 2008350251 (hide)

Owner Qucor Pty Ltd

Inventors Simmons, Michelle Yvonne; Pok, Wilson; Reusch, Thilo Curd Gerhard; Ruess, Frank; Weber, Bent; Fuechsle, Martin; Fuhrer, Andreas

Agent FB Rice

Pub. Number AU-A-2008350251

PCT Pub. Number WO2009/097643

Priority 2008900526 05.02.08 AU

Filing date 9 December 2008

Wipo publication date 13 August 2009

International Classifications

B82B 3/00 (2006.01) Manufacture or treatment of nano-structures

B82B 1/00 (2006.01) Nano-structures

H01L 21/28 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/31 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

30 September 2010 PCT application entered the National Phase

  PCT publication WO2009/097643 Priority application(s): WO2009/097643

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