Cobalt nitride layers for copper interconnects and methods for forming them

Details for Australian Patent Application No. 2008347088 (hide)

Owner President and Fellows of Harvard College

Inventors Bhandari, Harish; Gordon, Roy Gerald; Kim, Hoon

Agent Davies Collison Cave

Pub. Number AU-A-2008347088

PCT Pub. Number WO2009/088522

Priority 60/922,485 09.04.07 US; 60/998,023 05.10.07 US

Filing date 9 April 2008

Wipo publication date 16 July 2009

International Classifications

C23C 16/18 (2006.01) Chemical deposition or plating by decomposition - from metallo-organic compounds

C07F 15/06 (2006.01) Compounds containing elements of the 8th Group of the Periodic System

H01L 23/48 (2006.01) Details of semiconductor or other solid state devices - Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads or terminal arrangements

Event Publications

29 October 2009 PCT application entered the National Phase

  PCT publication WO2009/088522 Priority application(s): WO2009/088522

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