Method for manufacturing workpieces and apparatus

Details for Australian Patent Application No. 2008316467 (hide)

Owner OC Oerlikon Balzers AG

Inventors Heinz, Bernd

Agent Griffith Hack

Pub. Number AU-A-2008316467

PCT Pub. Number WO2009/053435

Priority 60/982,256 24.10.07 US

Filing date 23 October 2008

Wipo publication date 30 April 2009

International Classifications

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

29 April 2010 PCT application entered the National Phase

  PCT publication WO2009/053435 Priority application(s): WO2009/053435

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