Structures of and methods for forming vertically aligned Si wire arrays

Details for Australian Patent Application No. 2008275878 (hide)

Owner California Institute of Technology

Inventors Filler, Michael A.; Lewis, Nathan S.; Atwater, Harry A.; Kayes, Brendan M.

Agent Shelston IP

Pub. Number AU-A-2008275878

PCT Pub. Number WO2009/012469

Priority 60/961,170 19.07.07 US; 60/961,169 19.07.07 US

Filing date 18 July 2008

Wipo publication date 22 January 2009

International Classifications

H01L 21/027 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

18 February 2010 PCT application entered the National Phase

  PCT publication WO2009/012469 Priority application(s): WO2009/012469

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