Treatment system for flat substrates

Details for Australian Patent Application No. 2008271675 (hide)

Owner Leybold Optics GmbH

Inventors Roder, Mario; Geisler, Michael; Merz, Thomas

Agent Hodgkinson McInnes

Pub. Number AU-A-2008271675

PCT Pub. Number WO2009/003552

Priority 10 2007 022 252.3 09.05.07 DE; 10 2007 022 431.3 10.05.07 DE

Filing date 28 April 2008

Wipo publication date 8 January 2009

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/677 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 January 2010 PCT application entered the National Phase

  PCT publication WO2009/003552 Priority application(s): WO2009/003552

28 April 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2008271684-Shank chisel

2008271669-Process for surface pasteurization and sterilization of food pieces