Method for eliminating defects from semiconductor materials

Details for Australian Patent Application No. 2008262397 (hide)

Owner OPC Laser Systems LLC

Inventors Henrichs, Joseph Reid

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2008262397

PCT Pub. Number WO2008/153843

Priority 11/810,561 06.06.07 US

Filing date 2 June 2008

Wipo publication date 18 December 2008

Acceptance publication date 16 February 2012

International Classifications

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

29 October 2009 PCT application entered the National Phase

  PCT publication WO2008/153843 Priority application(s): WO2008/153843

16 February 2012 Application Accepted

  Published as AU-B-2008262397

14 June 2012 Standard Patent Sealed

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