Method of forming openings in selected material

Details for Australian Patent Application No. 2008210253 (hide)

Owner NewSouth Innovations Pty Limited

Inventors Lennon, Alison; Wenham, Stuart Ross; Utama, Roland Yudadibrata; Ho-Baillie, Anita Wing Yi

Agent FB Rice

Pub. Number AU-A-2008210253

PCT Pub. Number WO2008/092186

Priority 2007904726 31.08.07 AU; 2007900451 31.01.07 AU

Filing date 10 January 2008

Wipo publication date 7 August 2008

International Classifications

H01L 21/4763 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

10 September 2009 PCT application entered the National Phase

  PCT publication WO2008/092186 Priority application(s): WO2008/092186

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