Owner Shin-Etsu Chemical Co., Ltd. ShinEtsu Handotai Co., Ltd.

Inventors Watabe, Takenori; Ishikawa, Naoki; Ueguri, Toyohiro; Ojima, Satoyuki; Saisu, Shigenori; Ohtsuka, Hiroyuki

Agent Shelston IP

Pub. Number AU-B-2007289892

PCT Pub. Number WO2008/026415

Priority 2006-236499 31.08.06 JP

Filing date 2 August 2007

Wipo publication date 6 March 2008

Acceptance publication date 27 September 2012

H01L 31/04 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - adapted as conversion devices

H01L 21/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/0224 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Electrodes