Spin coater with optical controls
Details for Australian Patent Application No. 2007289367 (hide)
International Classifications
Event Publications
12 February 2009 PCT application entered the National Phase
PCT publication WO2008/027794 Priority application(s): WO2008/027794
21 April 2011 Application Accepted
Published as AU-B-2007289367
18 August 2011 Standard Patent Sealed
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