REFRACTIVE PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

Details for Australian Patent Application No. 2003304557 (hide)

Owner CARL ZEISS SMT AG

Inventors DODOC, Aurelian; ULRICH, Wilhelm; ROSTALSKI, Hans-Jurgen

Pub. Number AU-A-2003304557

PCT Number PCT/EP2003/0116

PCT Pub. Number WO2005/050321

Filing date 22 October 2003

Wipo publication date 8 June 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

Event Publications

21 July 2005 Complete Application Filed

28 July 2005 Application Open to Public Inspection

  Published as AU-A-2003304557

6 July 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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